Critical equipment subsystems (RF/vacuum)

MKS Instruments

A supplier of critical subsystems for semiconductor equipment: RF/microwave power (world #1), vacuum and gas flow, photonics (Newport) and materials (Atotech), feeding etch and deposition tools. ASML, Applied Materials and Lam Research rely heavily on MKS subsystems. ~$0.97B quarterly revenue in 2025 (AI/NAND demand).

MKSI Updated Jun 21, 2026 1 AI consumers

Annual return · 2026-06-18'21+16.4%'22-51%'23+22.6%'24+2.2%'25+54.4%YTD+154.7%
MKS Instruments~$0.97B quarterly revenue
Money out부품·소재 (비공개)R&D·엔지니어 (비공개)

Financials & Segments

  • Total revenue · ~$0.97B quarterly revenue (2025)
  • Customer concentration · Customers AMAT, Lam, ASML (some overlap/competition).
  • Segments · RF/microwave power · Vacuum/flow · Photonics (Newport) · Materials (Atotech)

Revenue from

  • Lam Research High confidence
    Supplies RF power, vacuum and other subsystems to lam-research tools.
    Confirms EN Wikipedia Published Jan 1, 2026: "lam-research relies heavily on MKS subsystems."
    Confirms EN Yole Group Published Jan 1, 2025: "lam-research relies heavily on MKS subsystems."
  • Applied Materials High confidence
    Supplies RF power, vacuum and other subsystems to applied-materials tools.
    Confirms EN Wikipedia Published Jan 1, 2026: "applied-materials relies heavily on MKS subsystems."
    Confirms EN Yole Group Published Jan 1, 2025: "applied-materials relies heavily on MKS subsystems."
    Confirms KO TheElec Published Feb 1, 2023: "AMAT, Lam and SEMES rely on MKS RF/vacuum parts."
    Confirms KO ETNews Published Apr 9, 2019: "AMAT, Lam and SEMES rely on MKS RF/vacuum parts."
  • ASML Medium confidence
    Supplies RF power, vacuum and other subsystems to asml tools.
    Confirms EN Wikipedia Published Jan 1, 2026: "asml relies heavily on MKS subsystems."
    Confirms EN Yole Group Published Jan 1, 2025: "asml relies heavily on MKS subsystems."
  • Tokyo Electron (TEL) Medium confidence
    Supplies RF power, vacuum and other subsystems to tokyo-electron tools.
    Confirms EN Wikipedia Published Jan 1, 2026: "tokyo-electron relies heavily on MKS subsystems."
    Confirms EN Yole Group Published Jan 1, 2025: "tokyo-electron relies heavily on MKS subsystems."

Pays to

  • 부품·소재 (비공개) Low confidence
    Power, vacuum and optical components and materials.
    Confirms EN MKS / SEC Published Feb 1, 2026: "Sources components and materials for subsystems."
  • R&D·엔지니어 (비공개) Low confidence
    Subsystem R&D staff (undisclosed).
    Confirms KO TheElec Published Feb 1, 2023: "RF/vacuum/photonics subsystem R&D."

Value-chain ripple (tiers 2–3)

Following node-to-node links up to 3 tiers; each firm is shown once, at its nearest tier.

CompanyChain'21'22'23'24'25YTD
Marvelllead3+84.9-57.5+63.7+83.8-22.8+265.9
Intellead3+6.1-46.6+94.6-59.6+84+263.1
MediaTeklead3+27.8-26.6+49+59.1+25.1+154.3
AMDlead3+56.9-55+127.6-18.1+77.3+150.9
Astera Labslead3····+25.6+150.7
Credo Technologylead3··+46.3+245.2+114.1+88.9
Texas Instrumentslead3+17.5-9.9+6.4+13.1-4.5+88.3
Global Unichiplead3+21.4+67.6+99.4-13.7+101.4+86.3
Renesas Electronicslead3+8.2+2.4+88-13.6+23.8+83.8
NXP Semiconductorslead3+44.8-29.4+48.4-8+6.4+45.7
Alchip Technologieslead3+14.3-8.7+365.1-18.9+0.8+40.2
Qualcommlead3+22.3-38.4+35.1+7.7+13.9+34.2
Broadcomlead3+56.8-13.4+104.9+110.9+50.7+19.3
Alphabet (Google)lead3+65.3-39.1+58.3+35.8+66.1+17.8
NVIDIAlead3+125.5-50.3+239+171.3+38.9+13.1
Applelead3+34.6-26.4+49+30.7+9.1+9.8
Amazonlead3+2.4-49.6+80.9+44.4+5.2+5.9
Sony Semiconductor Solutionslead3+27.2-8.4+27.8+17.9+1-8.7
Meta Platformslead3+23.1-64.2+194.1+65.9+13.1-12.3
Microsoftlead3+52.5-28+58.2+12.9+15.6-21.2
SanDisklead2·····+820.4
Kioxialead2····+1082.1+408.4
Micron Technologylead2+24.1-46+72.1-1+240.5+297.6
United Microelectronics (UMC)lead2+43.2-40.3+39.2-19+28.8+206.4
SK hynixlead2-0.4-25.6+53.9+48.6+361.1+204.7
GlobalFoundrieslead2·-17.1+12.5-29.2-18.6+145.8
Samsung Electronicslead2-9-14.2+20.9-26.4+212.9+121
ROHMlead2-9+10.9+1.7-40.8+86.1+106.1
TSMClead2+12.1-36.8+42.5+92.9+56+53.3
SMIClead2-29.6-7.4-18.3+169.9+98.4+1.5
Applied Materialslead1+83.6-37.5+68+1.1+59.6+140.7
Lam Researchlead1+53.7-40.8+88.8-6.9+139.5+128.1
Tokyo Electron (TEL)lead1+40.4-14.5+89.8-4.4+61.6+84.1
ASMLlead1+64.1-30.5+39.9-7.7+55.8+81
MKS Instrumentsnode+16.4-51+22.6+2.2+54.4+154.7

YTD as of 2026-06-18 · source: Yahoo Finance


← All companiesMarkdown · JSON

For information only, not investment advice. Data is refined from public sources and may contain errors.

ValueChain.wikiCompany value-chain data